发明授权
US5204712A Support device with a tiltable object table, and optical lithographic
device provided with such a support device
失效
具有可倾斜物体表的支撑装置和具有这种支撑装置的光学装置
- 专利标题: Support device with a tiltable object table, and optical lithographic device provided with such a support device
- 专利标题(中): 具有可倾斜物体表的支撑装置和具有这种支撑装置的光学装置
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申请号: US774763申请日: 1991-10-09
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公开(公告)号: US5204712A公开(公告)日: 1993-04-20
- 发明人: Adrianus G. Bouwer , Marcel C. M. Baggen , Henricus W. A. Janssen , Petrus R. Bartray , Jan Van Eijk
- 申请人: Adrianus G. Bouwer , Marcel C. M. Baggen , Henricus W. A. Janssen , Petrus R. Bartray , Jan Van Eijk
- 申请人地址: NY New York NLX Veldhoven
- 专利权人: U.S. Philips Corp.,A.S.M. Lithography B.V.
- 当前专利权人: U.S. Philips Corp.,A.S.M. Lithography B.V.
- 当前专利权人地址: NY New York NLX Veldhoven
- 优先权: NLX9100421 19910308
- 主分类号: B23Q1/36
- IPC分类号: B23Q1/36 ; B23Q1/54 ; G03F7/20 ; G12B5/00 ; H01L21/027 ; H01L21/68
摘要:
A support device comprises a first and a second bearing unit for guiding the support device along a base surface and a straight guide extending parallel to the base surface, respectively. The support device has an object table which is coupled to a rigidification member and which is displaceable relative to the two bearing units in a z-direction transverse to the base surface and is tiltable about at least one axis of rotation directed parallel to the base surface by three force actuators. The rigidification member is coupled to the second bearing unit by a coupling member which is elastically deformable in the z-direction, and coupled to the first bearing unit via the force actuators, whereby a statically determined coupling of the rigidification member and the object table to the two bearing units is obtained. The support device is particularly suitable for displacements of an object in the sub-micron range, such as, for example, in an optical lithographic device. In particular, an accurate focusing of the object may be obtained by the use of the support device in an optical lithographic device.
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