发明授权
US5205900A Method of monitoring surface roughness of crystal, and crystal growth equipment 失效
监测晶体表面粗糙度和晶体生长设备的方法

Method of monitoring surface roughness of crystal, and crystal growth
equipment
摘要:
Changes in the formation of crystal surface roughness are monitored by making a laser beam incident on the surface of a growing crystal and detecting a reflected laser beam diffracted at the surface of the growing crystal, at a position standing apart from the optical axis of mirror face reflected light of the incident laser beam. A crystal growth equipment making use of this method is also disclosed.
公开/授权文献
信息查询
0/0