发明授权
US5208468A Semiconductor laser device with a sulfur-containing film provided between the facet and the protective film 失效
半导体激光装置具有设置在小面和保护膜之间的含硫膜

Semiconductor laser device with a sulfur-containing film provided
between the facet and the protective film
摘要:
A semiconductor laser device is disclosed which emits laser light from a facet. The semiconductor laser device comprises a multi-layered structure formed on a semiconductor substrate, the multi-layered structure having an AlGaAs active layer for laser oscillation, and a protective film formed on the facet, wherein a film containing sulfur is provided between the facet and the protective film.
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