发明授权
- 专利标题： Method of hardening metal surfaces
- 专利标题（中）： 硬化金属表面的方法
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申请号： US796943申请日： 1991-11-25
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公开(公告)号： US5217748A公开(公告)日： 1993-06-08
- 发明人: Vladimir N. Kestelman , Tatjana Zlatina
- 申请人： Vladimir N. Kestelman , Tatjana Zlatina
- 申请人地址： NJ Moorestown
- 专利权人： Development Products, Inc.
- 当前专利权人： Development Products, Inc.
- 当前专利权人地址： NJ Moorestown
- 主分类号： C23C14/06
- IPC分类号： C23C14/06 ; C23C14/32
摘要：
A coating is provided to a substrate in a vacuum chamber having an electric arc evaporator to form an ion-plasma comprising accelerated ions and neutral atoms of evaporated metal. The substrate contained in the vacuum chamber is provided with a negative voltage bias such that the ion-plasma is drawn to the substrate and deposited on its surface to provide the coating. A pulsed negative voltage bias is maintained on the substrate such that the substrate temperature can be maintained within the range of zero to 200.degree. C.
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