发明授权
US5225373A Method of manufacturing semiconductor pressure sensor device with two
semiconductor pressure sensor chips
失效
制造具有两个半导体压力传感器芯片的半导体压力传感器装置的方法
- 专利标题: Method of manufacturing semiconductor pressure sensor device with two semiconductor pressure sensor chips
- 专利标题(中): 制造具有两个半导体压力传感器芯片的半导体压力传感器装置的方法
-
申请号: US853190申请日: 1992-03-18
-
公开(公告)号: US5225373A公开(公告)日: 1993-07-06
- 发明人: Yoshiharu Takahashi , Seiji Takemura , Keitaro Tsukui , Junko Itoh , Eitaro Nagai , Yasuo Tada , Yuuji Kishimoto , Sakae Kiguchi
- 申请人: Yoshiharu Takahashi , Seiji Takemura , Keitaro Tsukui , Junko Itoh , Eitaro Nagai , Yasuo Tada , Yuuji Kishimoto , Sakae Kiguchi
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX2-56215 19900307; JPX2-243009 19900912
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; H01L23/495
摘要:
A semiconductor pressure sensor device that improve the measuring accuracy without providing a silicon base in attaching a semiconductor pressure sensor chip to a lead frame, and a method of manufacturing thereof is disclosed. The semiconductor pressure sensor device includes a die-bond adhesive 10 formed of a resilient material for fixing a semiconductor pressure sensor chip 50 to a lead frame 100, a wire bond receiving projection 4 provided in the diepad where the semiconductor pressure sensor chip 50 is attached for receiving pressure application force from the bottom of the semiconductor pressure sensor chip 50 at the time of wire bonding, and a supporting projection 11 for preventing distortion stress by the wire bond receiving projection 4 from being transmitted. Thermal distortion of the semiconductor pressure sensor chip 50 and the lead frame 100 is absorbed by die-bond adhesive 10. By wire bond receiving projection 4 and supporting projection 11, stress acting on the semiconductor pressure sensor chip 50 is decreased to improve the measuring accuracy.
公开/授权文献
- US4774609A Device for a flexible magnetic disk 公开/授权日:1988-09-27
信息查询