发明授权
- 专利标题： Apparatus and method for oxidation treatment of metal
- 专利标题（中）： 金属氧化处理装置及方法
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申请号： US602231申请日： 1990-11-05
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公开(公告)号： US5226968A公开(公告)日： 1993-07-13
- 发明人: Tadahiro Ohmi , Kazuhiko Sugiyama , Fumio Nakahara , Satoshi Mizokami
- 申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Fumio Nakahara , Satoshi Mizokami
- 申请人地址： JPX Miyagi
- 专利权人： Ohmi; Tadahiro
- 当前专利权人： Ohmi; Tadahiro
- 当前专利权人地址： JPX Miyagi
- 优先权： JPX63-195185 19880804
- 主分类号： C23C8/18
- IPC分类号： C23C8/18 ; C23C8/10 ; H01L21/31
摘要：
A metal oxidation treatment apparatus to form the passivation film on the surface of the metal to be oxidized such as stainless steel or the like, comprising an oxidation furnace, a gas inlet to introduce gas into said oxidation furnace, a discharge outlet to discharge the gas from said oxidation furnace, and a heater to heat said oxidation furnace to the predetermined temperature, so that the metal to be oxidized is heated and oxidized in dry oxidation atmosphere while gas is passed in said oxidation furnace.
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