发明授权
US5227316A Method of forming self aligned extended base contact for a bipolar
transistor having reduced cell size
失效
形成具有减小细胞尺寸的双极晶体管的自对准扩展基底接触的方法
- 专利标题: Method of forming self aligned extended base contact for a bipolar transistor having reduced cell size
- 专利标题(中): 形成具有减小细胞尺寸的双极晶体管的自对准扩展基底接触的方法
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申请号: US744191申请日: 1991-08-12
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公开(公告)号: US5227316A公开(公告)日: 1993-07-13
- 发明人: Madhukar Vora , Greg Burton , Ashok Kapoor
- 申请人: Madhukar Vora , Greg Burton , Ashok Kapoor
- 申请人地址: CA Santa Clara
- 专利权人: National Semiconductor Corporation
- 当前专利权人: National Semiconductor Corporation
- 当前专利权人地址: CA Santa Clara
- 主分类号: H01L21/285
- IPC分类号: H01L21/285 ; H01L21/768 ; H01L21/8249 ; H01L23/485 ; H01L23/528 ; H01L23/532 ; H01L27/108 ; H01L27/11
摘要:
There is disclosed herein a bipolar transistor structure having a self aligned extended silicide base contact. The contact extends to the position of a base contact window located outside the perimeter of the isolation island on a contact pad formed over the field oxide. This allows the size of the isolation island to be kept smaller and allows a smaller extrinsic base region to be formed. The base contact is formed of titanium and titanium silicide where the titanium/silicide boundary is self aligned with the edge of the device isolation island. The silicide is formed by reacting the titanium which completely covers the exposed epitaxial silicon inside the isolation island. An anisotropically etched oxide sidewall spacer insulates the silicide from the sidewall of the silicide-covered, polysilicon emitter contact.
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