发明授权
- 专利标题： Scanning probe microscope utilizing an optical element in a waveguide for dividing the center part of the laser beam perpendicular to the waveguide
- 专利标题（中）： 扫描探针显微镜利用在波导中的光学元件分割垂直于波导的激光束的中心部分
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申请号： US748687申请日： 1991-08-22
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公开(公告)号： US5231286A公开(公告)日： 1993-07-27
- 发明人: Hiroshi Kajimura , Jun Funazaki , Hideo Tomabechi , Hiroshi Tazaki , Keisuke Saito , Yasushi Nakamura
- 申请人： Hiroshi Kajimura , Jun Funazaki , Hideo Tomabechi , Hiroshi Tazaki , Keisuke Saito , Yasushi Nakamura
- 申请人地址： JPX Tokyo
- 专利权人： Olympus Optical Co., Ltd.
- 当前专利权人： Olympus Optical Co., Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX2-230100 19900831; JPX2-286981 19901026
- 主分类号： G01Q20/02
- IPC分类号： G01Q20/02 ; G01Q30/00
摘要：
A scanning probe microscope according to the present invention comprises a cantilever having a free end portion and a fixed end portion, the free end portion bearing a probe thereon, a semiconductor laser attached to the fixed end portion of the cantilever, an optical waveguide for guiding a laser beam, emitted from the semiconductor laser, to the free end portion, an optical element for dividing part of a center beam of the laser beam, guided through the optical waveguide, into laser beams in at least two perpendicular directions, a photoelectric transducer for receiving the divided laser beams and converting the laser beams into electrical output signals corresponding thereto, and a differential circuit for receiving the electrical signals and subjecting the signals to predetermined arithmetic processing, thereby detecting a three-dimensional displacement of the free end portion of the cantilever.
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