发明授权
- 专利标题： Radiation-curable composition and radiation-sensitive recording material prepared therefrom for use with high-energy radiation
- 专利标题（中）： 辐射可固化组合物和辐射敏感记录材料制备用于高能量辐射
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申请号： US369677申请日： 1989-06-21
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公开(公告)号： US5234791A公开(公告)日： 1993-08-10
- 发明人: Ralph Dammel , Karl-Friedrich Doessel , Juergen Lingnau , Juergen Theis
- 申请人： Ralph Dammel , Karl-Friedrich Doessel , Juergen Lingnau , Juergen Theis
- 申请人地址： DEX Frankfurt am Main
- 专利权人： Hoechst Aktiengesellschaft
- 当前专利权人： Hoechst Aktiengesellschaft
- 当前专利权人地址： DEX Frankfurt am Main
- 优先权： DEX3821584 19880625
- 主分类号： G03F7/004
- IPC分类号： G03F7/004 ; G03F7/029 ; G03F7/038 ; H01L21/027 ; H01L21/30
摘要：
A radiation-curable composition which comprises a compound that forms an acid under the action of high-energy radiation and an acid-hardening substance, wherein the compound forming an acid contains aromatically linked chlorine or bromine and has a pK.sub.a value below 12. The composition and the recording material prepared therefrom display increased sensitivity, improved resolution and a high etch resistance after development.
公开/授权文献
- US6130220A Sulfamide-metalloprotease inhibitors 公开/授权日：2000-10-10
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