发明授权
- 专利标题： Megasonic cleaning system
- 专利标题（中）： 超声波清洗系统
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申请号： US791094申请日： 1991-11-12
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公开(公告)号： US5247954A公开(公告)日： 1993-09-28
- 发明人: Robert W. Grant , Richard E. Novak
- 申请人： Robert W. Grant , Richard E. Novak
- 申请人地址： PA Allentown
- 专利权人： SubMicron Systems, Inc.
- 当前专利权人： SubMicron Systems, Inc.
- 当前专利权人地址： PA Allentown
- 主分类号： B08B3/12
- IPC分类号： B08B3/12 ; H01L21/00
摘要：
Megasonic cleaning system for use in cleaning of electronic or other items such as semiconductor wafers or semiconductor substrates in a wafer carrier. Formed piezoelectric transducers are bonded to a tubular envelope at a low temperature and are excited at a first frequency or a second higher frequency for cleaning of items in a cleaning tank. A novel sealing assembly accommodates tubular envelopes of varying diameters.
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