发明授权
- 专利标题: Superconducting thin film and wire on a smooth substrate
- 专利标题(中): 超导薄膜和导线在光滑的基板上
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申请号: US648964申请日: 1991-01-31
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公开(公告)号: US5252543A公开(公告)日: 1993-10-12
- 发明人: Saburo Tanaka , Hideo Itozaki , Kenjiro Higaki , Shuji Yazu , Tetsuji Jodai
- 申请人: Saburo Tanaka , Hideo Itozaki , Kenjiro Higaki , Shuji Yazu , Tetsuji Jodai
- 申请人地址: JPX Osaka
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX62-322380 19871220; JPX62-324701 19871222; JPX62-324702 19871222; JPX62-324703 19871222; JPX62-324704 19871222; JPX62-324705 19871222; JPX62-324706 19871222; JPX62-324707 19871222; JPX62-324708 19871222; JPX62-324709 19871222; JPX62-324710 19871222; JPX62-332304 19871229; JPX63-12331 19880122; JPX63-12332 19880122; JPX63-12333 19880122; JPX63-12334 19880122; JPX63-12335 19880122
- 主分类号: H01L39/14
- IPC分类号: H01L39/14 ; H01L39/24 ; B32B9/00
摘要:
Improvement in a superconducting thin film of compound oxide represented by the formula: LnBa.sub.2 Cu.sub.3 O.sub.7- .delta. (Ln is lanthanide) or (La.sub.1-x .alpha..sub.x).sub.2 CuO.sub.4 (.alpha. is Ba or Sr) deposited on a substrate or core made of MgO, SrTiO.sub.3 or ZrO.sub.2 by physical vapor deposition technique, the surface roughness R.sub.max (datum length=1,000 .mu.m) of the superconducting thin film being less than 0.2 .mu.m.
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