发明授权
US5256381A Apparatus for growing single crystals of III-V compound semiconductors
失效
用于生长III-V族化合物半导体单晶的装置
- 专利标题: Apparatus for growing single crystals of III-V compound semiconductors
- 专利标题(中): 用于生长III-V族化合物半导体单晶的装置
-
申请号: US842979申请日: 1992-02-28
-
公开(公告)号: US5256381A公开(公告)日: 1993-10-26
- 发明人: Koji Tada , Masami Tatsumi
- 申请人: Koji Tada , Masami Tatsumi
- 申请人地址: JPX Osaka
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX59-31146 19840221
- 主分类号: C30B27/02
- IPC分类号: C30B27/02 ; C30B35/00
摘要:
An apparatus for growing single crystals of III-V compound semiconductors of the vapor pressure control type using a vertical puller characterized by dividing the surface area of a melt into two sections, covering one section with a liquid encapsulant while maintaining the other section in contact with the atmosphere of the vessel (furnace). The apparatus comprises a sealable vessel, an upper shaft, a lower shaft, a plurality of heaters, a crucible and a means for dividing the surface of the melt contained in the crucible. As a result, single crystals of III-V compound semiconductors having various excellent properties such as low impurity content (high purity), low dislocation density and the like maybe obtained.
公开/授权文献
信息查询