发明授权
- 专利标题: Atomic force microscope
- 专利标题(中): 原子力显微镜
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申请号: US511054申请日: 1990-04-19
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公开(公告)号: US5260824A公开(公告)日: 1993-11-09
- 发明人: Takao Okada , Shuzo Mishima , Tsugiko Takase , Hirofumi Miyamoto , Hiroko Ohta , Yasushi Satoh , Yoshimitsu Enomoto , Toshiaki Matsuzawa , Yuzo Nakamura , Hiroshi Kajimura
- 申请人: Takao Okada , Shuzo Mishima , Tsugiko Takase , Hirofumi Miyamoto , Hiroko Ohta , Yasushi Satoh , Yoshimitsu Enomoto , Toshiaki Matsuzawa , Yuzo Nakamura , Hiroshi Kajimura
- 申请人地址: JPX Tokyo
- 专利权人: Olympus Optical Co., Ltd.
- 当前专利权人: Olympus Optical Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX1-104028 19890424; JPX1-207738 19890810; JPX1-240310 19890916
- 主分类号: G01B7/34
- IPC分类号: G01B7/34 ; G01B21/30 ; G01L5/00 ; G01Q20/02 ; G01Q20/04 ; G01Q30/02 ; G01Q60/38 ; G02B4/00 ; G01B5/28 ; G01N23/00
摘要:
An atomic force microscope comprises a probe having a sharply-pointed tip end. The probe is supported on the free end portion of a cantilever and is close to the surface of a specimen. When an interatomic force is produced, the cantilever is deformed, and the probe is displaced. The displacement of the probe is detected by an optical system. A light beam emitted from a light source is collimated by a lens, and reflected by a polarized beam-splitter, and also by a half-mirror. Then, the light beam passes through a quarter wavelength plate and an objective lens, such that the light is converged on the cantilever. The reflected light beam from the cantilever returns along the same optical path and passes through the splitter. The light beam is divided into two light beams at the splitter. These two light beams are reflected by respective prisms and are then incident on respective photodetectors. These photodetectors detect the displacement of the probe.
公开/授权文献
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