发明授权
US5268779A Spatial light modulator with composite film formed by vapor deposition of light blocking semiconductor material and insulation material 失效
具有复合膜的空间光调制器,通过汽相淀积阻光半导体材料和绝缘材料形成

Spatial light modulator with composite film formed by vapor deposition
of light blocking semiconductor material and insulation material
摘要:
Spatial light modulator of reflective type having a laminated structure of multiple layers comprising a photoconductive layer on which an information carried by an incident writing light is written, a photomodulation layer which modulates an incident reading light correspondingly with the written information and a composite film made of insulation material and light-blocking material which are chemically non-reactive each other, the composite film is interposed between the photoconductive layer and the photomodulation layer to block the incident reading light passing through the photomodulation layer. The composite film may be formed by evaporating simultaneously an insulation material of Al.sub.2 O.sub.3 and a light-blocking material of Ge from the respective material sources within a vacuum chamber of physical vapor deposition.
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