发明授权
- 专利标题： Hollow waveguide for ultraviolet wavelength region laser beams
- 专利标题（中）： 用于紫外波长区域激光束的空心波导
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申请号： US759598申请日： 1991-09-16
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公开(公告)号： US5276761A公开(公告)日： 1994-01-04
- 发明人: Masashi Shimoyama , Kazuo Kinoshita , Naoki Tsuchiya , Tohru Fukatsu
- 申请人： Masashi Shimoyama , Kazuo Kinoshita , Naoki Tsuchiya , Tohru Fukatsu
- 申请人地址： JPX Tokyo
- 专利权人： Ebara Corporation
- 当前专利权人： Ebara Corporation
- 当前专利权人地址： JPX Tokyo
- 主分类号： G02B6/032
- IPC分类号： G02B6/032 ; G02B6/10 ; G02B6/42 ; G02B6/20
摘要：
A hollow waveguide for ultraviolet wavelength region laser beams incorporates a glass tube composed of a glass material exhibiting a high transmissivity with respect to ultraviolet rays and an excellent environment resistant property, and a metal film exhibiting a high reflectivity with respect to the ultraviolet rays and formed outside the glass tube. The glass tube serves as an inner surface of the waveguide. The ultraviolet wavelength region laser beams are transmitted while being reflected by the inner surface of the glass tube and by an interface between the glass tube and the metal film.