发明授权
- 专利标题： Pneumatically and electrostatically driven scanning tunneling microscope
- 专利标题（中）： 气动和静电扫描隧道显微镜
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申请号： US20008申请日： 1993-02-17
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公开(公告)号： US5283437A公开(公告)日： 1994-02-01
- 发明人: Johann Greschner , Martin Nonnenmacher , Olaf Wolter
- 申请人： Johann Greschner , Martin Nonnenmacher , Olaf Wolter
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 优先权： EPX90125214.8 19901221
- 主分类号： G01Q60/16
- IPC分类号： G01Q60/16 ; G01Q10/04 ; H01J37/26
摘要：
A scanning tunneling microscope is disclosed with the probe tip formed as an integral part of a membrane. A counter-electrode is formed on the membrane and four electrodes are provided spaced apart from the counter-electrode. The tip is scanned by means of these electrodes. Coarse positioning of the tip along the Z axis is done by applying pressure or vacuum to the membrane. Also disclosed is the method of making the scanning tunneling microscope.
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