Invention Grant
- Patent Title: Electron microscope
- Patent Title (中): 电子显微镜
-
Application No.: US891510Application Date: 1992-05-29
-
Publication No.: US5289005APublication Date: 1994-02-22
- Inventor: Mikio Naruse , Eiichi Watanabe , Toru Kasai
- Applicant: Mikio Naruse , Eiichi Watanabe , Toru Kasai
- Applicant Address: JPX Tokyo
- Assignee: Jeol Ltd.
- Current Assignee: Jeol Ltd.
- Current Assignee Address: JPX Tokyo
- Main IPC: H01J37/20
- IPC: H01J37/20
Abstract:
An electron microscope capable of performing accurate X-ray analysis. A specimen stage on which a specimen to be investigated is placed, is disposed between the upper and lower magnetic pole pieces of the objective lens. The specimen is irradiated with the electron beam to detect X-rays emitted from the specimen. The specimen stage consists of a light element, such as beryllium, that produces a very small amount of X-rays when irradiated with the electron beam. A metal film of a heavy element, such as gold, is deposited on the upper surface of the specimen stage. This metal film produces a large amount of X-rays when irradiated with the electron beam. The X-rays emitted from the lower magnetic pole piece are absorbed by the metal film. Consequently, the X-ray detector of the microscope detects only the X-rays produced from the specimen.
Public/Granted literature
- US6097938A Authentication and tracking system for a cellular telephone Public/Granted day:2000-08-01
Information query