Invention Grant
US5289005A Electron microscope 失效
电子显微镜

Electron microscope
Abstract:
An electron microscope capable of performing accurate X-ray analysis. A specimen stage on which a specimen to be investigated is placed, is disposed between the upper and lower magnetic pole pieces of the objective lens. The specimen is irradiated with the electron beam to detect X-rays emitted from the specimen. The specimen stage consists of a light element, such as beryllium, that produces a very small amount of X-rays when irradiated with the electron beam. A metal film of a heavy element, such as gold, is deposited on the upper surface of the specimen stage. This metal film produces a large amount of X-rays when irradiated with the electron beam. The X-rays emitted from the lower magnetic pole piece are absorbed by the metal film. Consequently, the X-ray detector of the microscope detects only the X-rays produced from the specimen.
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