发明授权
- 专利标题: Fabrication method for microelectromechanical transducer
- 专利标题(中): 微机电换能器的制造方法
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申请号: US992528申请日: 1992-12-17
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公开(公告)号: US5290400A公开(公告)日: 1994-03-01
- 发明人: Stephen M. Bobbio
- 申请人: Stephen M. Bobbio
- 申请人地址: NC Research Triangle Park
- 专利权人: MCNC
- 当前专利权人: MCNC
- 当前专利权人地址: NC Research Triangle Park
- 主分类号: B06B1/02
- IPC分类号: B06B1/02 ; H02N1/00 ; H04R19/00
摘要:
A microelectromechanical transducer including a plurality of strips arranged in an array and maintained in a closely spaced relation by a plurality of spacers. An electrically conductive layer on portions of the strips and spacers distributes electrical signal within the transducer to cause adjacent portions of the strips to move together. The strips and spacers may be formed from a common dielectric layer using microelectronic fabrication techniques. Two transducers may be coupled at an angle offset from parallel for two-dimensional micropositioning. A photodetector and Fresnel lens may be combined with the micropositioner using the transducers for optical scanning microscopy.
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