Invention Grant
- Patent Title: Apparatus for maximizing light beam utilization
- Patent Title (中): 用于使光束利用最大化的装置
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Application No.: US957969Application Date: 1992-10-07
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Publication No.: US5290992APublication Date: 1994-03-01
- Inventor: How T. Lin , Mark V. Pierson
- Applicant: How T. Lin , Mark V. Pierson
- Applicant Address: NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: NY Armonk
- Main IPC: B23K26/06
- IPC: B23K26/06 ; B23K26/067 ; G03F7/20
Abstract:
The present invention is an apparatus and method for maximizing light beam utilization in patterning applications by positioning a plurality of mask mirrors in the light beam path to form patterned light onto a plurality of work pieces. Each mask mirror is designed so that a portion of the light beam area needed for exposing a work piece to patterned light is reflected from the mask mirror, while the remainder is passed through the mask mirror to another mask mirror. Alternatively, each mask mirror can be designed so that a portion of the light beam area needed for exposing a work piece to patterned light is passed through the mask mirror, while the remainder is reflected to another mask mirror.
Public/Granted literature
- US5899329A Display tool box Public/Granted day:1999-05-04
Information query
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