发明授权
- 专利标题: Electric arc coating device having an additional ionization anode
- 专利标题(中): 具有附加电离阳极的电弧涂覆装置
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申请号: US922332申请日: 1992-07-30
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公开(公告)号: US5294322A公开(公告)日: 1994-03-15
- 发明人: Jorg Vetter , Nikolaus Matentzoglu , Manfred Schmidt-Mauer
- 申请人: Jorg Vetter , Nikolaus Matentzoglu , Manfred Schmidt-Mauer
- 申请人地址: DEX Bergisch Gladbach
- 专利权人: Multi-Arc Oberflachentechnik GmbH
- 当前专利权人: Multi-Arc Oberflachentechnik GmbH
- 当前专利权人地址: DEX Bergisch Gladbach
- 优先权: DEX4125365 19910731
- 主分类号: C23C14/02
- IPC分类号: C23C14/02 ; C23C14/32 ; H01J37/32
摘要:
An electric arc coating is comprised of a chamber with a chamber wall for receiving the substrates to be coated. The chamber can be evacuated and be optionally filled with a reaction gas or an inert gas. The device has at least one cathode connected to a first direct current source positioned within the chamber so as to be electrically insulated. The cathode is consumed by the electric arc. A second direct current source having a higher voltage than the first direct current source is connected with its negative pole to the substrates to be coated and is electrically insulated from the chamber. A first and a second anode are provided whereby the second anode is electrically insulated from the first anode and connected to a third current source. The positive poles of the first and the second current sources are connected to at least the first anode.
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