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US5296018A Method and apparatus for eliminating electric charges in a clean room 失效
清洁室内电荷消除的方法和装置

Method and apparatus for eliminating electric charges in a clean room
摘要:
A method and apparatus for eliminating electric charges in a clean room is disclosed involving removing fine and superfine grains from air in the clean room, and generating ions in the thus purified air inside the room.
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