发明授权
- 专利标题: At-cut crystal oscillating reed and method of etching the same
- 专利标题(中): 切割晶体振荡簧片及其蚀刻方法
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申请号: US901287申请日: 1992-06-19
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公开(公告)号: US5304459A公开(公告)日: 1994-04-19
- 发明人: Hideaki Nakamura , Eiji Karaki
- 申请人: Hideaki Nakamura , Eiji Karaki
- 申请人地址: JPX Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX2-114686 19900427; JPX2-249649 19900919; JPX2-249650 19900919; JPX2-249651 19900919; JPX2-249652 19900919; JPX2-252260 19900921; JPX2-252261 19900921
- 主分类号: H03H3/02
- IPC分类号: H03H3/02 ; H03H9/02 ; H03H9/19 ; G03C5/00 ; H01L41/04
摘要:
An AT-cut crystal oscillating reed formed by etching an AT-cut crystal wafer is provided. The wafer has a rotational parallel cut obtained by rotating a parallel cut by an angular degree of .theta..degree. relative to the X-axis of the wafer. The etching cross-section of the AT-cut crystal oscillating reed has a surface at an angle about 90.degree. from the front or back surface of the AT-cut crystal oscillating reed. This AT-cut crystal oscillating reed exhibits uniform characteristics and excellent reliability. Also provided is an AT-cut crystal oscillating reed with a low CI value. Finally, a method of etching an AT-cut crystal oscillating reed from an AT-cut crystal wafer is provided. A corrosion resisting film with gaps coats the wafer and is used in the etching process. In a preferred embodiment, the thickness of the wafer is designated t, the width of the gaps in the corrosion resisting films is designated l, and l.gtoreq.t/tan .theta.. The corrosion resisting film may be metal and may be formed into electrodes after the crystal oscillating reed is etched. In this manner, crystal oscillating reeds may be mass produced at a relatively low cost.
公开/授权文献
- US5978027A Image pickup apparatus having sharpness control 公开/授权日:1999-11-02
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