发明授权
- 专利标题： Film peeling method and apparatus for practicing same
- 专利标题（中）： 薄膜剥离方法及其实施方法
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申请号： US979430申请日： 1992-11-19
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公开(公告)号： US5312505A公开(公告)日： 1994-05-17
- 发明人: Shigeo Sumi , Fumio Hamamura , Mitsuhiro Seki , Ichio Fukuda
- 申请人： Shigeo Sumi , Fumio Hamamura , Mitsuhiro Seki , Ichio Fukuda
- 申请人地址： JPX Tokyo
- 专利权人： Somar Corporation
- 当前专利权人： Somar Corporation
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX2-91555 19900406; JPX2-231924 19900901
- 主分类号： B29C63/00
- IPC分类号： B29C63/00 ; G03F7/16 ; H05K3/00 ; B32B35/00
摘要：
A film peeling apparatus is disclosed wherein a base plate stuck with the films is conveyed to a film peeling position, where a contact tightness of leading edges of the films to the base plate is reduced by a film contact tightness reducer while relative moving speed of the base plate and the reducer is decreased by slowing down the conveyance speed of the base plate or by moving the reducer in synchronism with the conveyance of the base plate without stopping the conveyance of the base plate.
公开/授权文献
- US6029883A Envelope 公开/授权日：2000-02-29
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