发明授权
US5320225A Apparatus and method for securely carrying a substrate 失效
用于牢固地承载基底的装置和方法

  • 专利标题: Apparatus and method for securely carrying a substrate
  • 专利标题(中): 用于牢固地承载基底的装置和方法
  • 申请号: US52950
    申请日: 1993-04-23
  • 公开(公告)号: US5320225A
    公开(公告)日: 1994-06-14
  • 发明人: John Kirkpatrick
  • 申请人: John Kirkpatrick
  • 申请人地址: TX Pflugerville
  • 专利权人: HRC Products
  • 当前专利权人: HRC Products
  • 当前专利权人地址: TX Pflugerville
  • 主分类号: G03F7/20
  • IPC分类号: G03F7/20 H01L21/673 B65D85/48 A45D42/14
Apparatus and method for securely carrying a substrate
摘要:
A container or carrier for securely carrying a substrate such as a reticle, mask, wafer, or the like during a semiconductor manufacturing process or during the transport of the substrate. The container includes a housing having an opening through which the substrate may be inserted and removed. The housing includes an open box and a lid, the lid securely held in place by a unique latching mechanism. A door that is hinged upon the lid and held in place by biasing springs substantially seals the housing opening. Within the housing are a plurality of suction cups upon which the substrate rests and which apply suction to firmly engage the substrate on only one side when the substrate is in a contained position. The suction cups hold the substrate in the contained position thereby preventing relative motion between the container and the substrate. The invention further provides for increasing the suction applied by the suction cups to the substrate by applying additional suction to modified suction cups from a vacuum pump. The invention also provides a method for securely containing a substrate within a container. The method including the step of fixing the substrate in a contained position within the substrate using suction.
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