发明授权
US5323003A Scanning probe microscope and method of observing sample by using such a
microscope
失效
扫描探针显微镜和使用这种显微镜观察样品的方法
- 专利标题： Scanning probe microscope and method of observing sample by using such a microscope
- 专利标题（中）： 扫描探针显微镜和使用这种显微镜观察样品的方法
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申请号： US936774申请日： 1992-08-28
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公开(公告)号： US5323003A公开(公告)日： 1994-06-21
- 发明人: Shunichi Shido , Toshihiko Miyazaki , Kunihiro Sakai , Takahiro Oguchi , Akihiko Yamano
- 申请人： Shunichi Shido , Toshihiko Miyazaki , Kunihiro Sakai , Takahiro Oguchi , Akihiko Yamano
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX3-252922 19910903
- 主分类号： G01Q10/06
- IPC分类号： G01Q10/06 ; G01Q30/04 ; H01J37/26
摘要：
A scanning probe microscope is provided with a probe, a scanning device, a detecting device and an output device. The probe is disposed to face the surface of a sample. The scanning device two-dimensionally scans the surface of the sample using the probe. A signal corresponding to the structure of the sample is detected from the probe by the detecting device. From the signal detected in the detecting device, an observation image of the sample is output by the output device. The apparatus is further provided with a correcting device for correcting the scan by the scanning device so that the observation image output from the outputting device is not shifted.
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