发明授权
- 专利标题: Process for the manufacture of a force sensor
- 专利标题(中): 用于制造力传感器的过程
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申请号: US956892申请日: 1992-11-30
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公开(公告)号: US5349746A公开(公告)日: 1994-09-27
- 发明人: Werner Gruenwald , Kurt Schmid , Martin Mast
- 申请人: Werner Gruenwald , Kurt Schmid , Martin Mast
- 申请人地址: DEX Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DEX Stuttgart
- 优先权: DEX4014511 19900507
- 主分类号: G01L1/22
- IPC分类号: G01L1/22 ; H01C17/06
摘要:
A process and a device are proposed for manufacturing sensors, particularly those intended for the determination of pressure forces. In thick-film technology, initially at least one insulating layer (14) is produced on a pressure support (10), whereupon a pressure-sensitive resistance layer (12) and finally conductor paths (13) are applied. In a pressing tool (20-22), the layer arrangement (11-14) is then compressed together with a plastic pressure substance (15). Finally, the pressure support (10) is removed from the pressed article.