发明授权
- 专利标题: Method and apparatus for a rapid thermal processing of delicate components
- 专利标题(中): 用于快速热处理精密部件的方法和装置
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申请号: US913093申请日: 1992-07-14
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公开(公告)号: US5359693A公开(公告)日: 1994-10-25
- 发明人: Zsolt Nenyei , Thomas Knarr , Heinrich Walk
- 申请人: Zsolt Nenyei , Thomas Knarr , Heinrich Walk
- 申请人地址: DEX Kirchheim
- 专利权人: AST elektronik GmbH
- 当前专利权人: AST elektronik GmbH
- 当前专利权人地址: DEX Kirchheim
- 优先权: DEX4123318 19910715
- 主分类号: B01J19/12
- IPC分类号: B01J19/12 ; G05D23/19 ; H01L21/268 ; H01L21/324 ; H01L21/00
摘要:
A low defect rate is provided in rapid thermal processing of delicate components with reduction of defects caused by inhomogeneities of temperature during a rapid thermal processing. In a suitable system a defect-guarded RTP method is carried out in such a manner that the density of the heating energy is adjusted in consecutive intervals of time, which may be as short as desired, to such automatically controlled limiting values or to such fixed values that in the reaction chamber the difference between the primary and secondary energy densities is almost continuously held at the minimum which is achievable throughout the thermal processing whereas the ramps have predetermined slopes.
公开/授权文献
- US5872281A Amino acid derivative having N,N-dialkylaminophenyl group 公开/授权日:1999-02-16