发明授权
- 专利标题: Electrode plate and process for production thereof
- 专利标题(中): 电极板及其制造方法
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申请号: US895609申请日: 1992-06-09
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公开(公告)号: US5361153A公开(公告)日: 1994-11-01
- 发明人: Masayuki Shimamune , Takashi Enomoto , Toshifumi Yoshioka
- 申请人: Masayuki Shimamune , Takashi Enomoto , Toshifumi Yoshioka
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX3-140107 19910612
- 主分类号: G02F1/1343
- IPC分类号: G02F1/1343
摘要:
An electrode plate suitable for use in an electro-optical device, such as a liquid crystal device, is formed by successively disposing on a substrate a first layer of a transparent conductor film, a second layer of molybdenum or a molybdenum alloy, a third layer of aluminum or an aluminum alloy, and a fourth layer of molybdenum or a molybdenum alloy. The laminate electrode structure is patterned by a photolithographic process, followed by removal of the photoresist with a peeling liquid, during which the fourth molybdenum layer functions as a protective film for the third al layer against the peeling liquid to prevent the formation of electrode defects.