发明授权
- 专利标题： Article storage house in a clean room
- 专利标题（中）： 物品存放在洁净室内
-
申请号： US6318申请日： 1993-01-21
-
公开(公告)号： US5363867A公开(公告)日： 1994-11-15
- 发明人: Hitoshi Kawano , Atsushi Okuno , Masanori Tsuda , Mitsuhiro Hayashi , Teppei Yamashita , Masanao Murata , Tsuyoshi Tanaka , Teruya Morita , Akio Nakamura
- 申请人： Hitoshi Kawano , Atsushi Okuno , Masanori Tsuda , Mitsuhiro Hayashi , Teppei Yamashita , Masanao Murata , Tsuyoshi Tanaka , Teruya Morita , Akio Nakamura
- 申请人地址： JPX Tokyo
- 专利权人： Shinko Electric Co., Ltd.
- 当前专利权人： Shinko Electric Co., Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX4-008663 19920121; JPX4-012311 19920127
- 主分类号： B08B9/093
- IPC分类号： B08B9/093 ; H01L21/677 ; B08B3/00
摘要：
An article storage house in a clean room for airtightly accommodating a wafer cassette, etc. in which the wafer cassette carried in from the outside of an article carry-in/out portion is accommodated into a container by an automatic article delivery unit disposed in the article carry-in/out portion or it is carried in the article storage house while it is accommodated in the container and is stored in sections of the article storage house. An inert gas purge mechanism and an automatic container cleaning portion are disposed in the automatic article delivery unit or each section.
公开/授权文献
- USD353602S Laser light for a miter box 公开/授权日：1994-12-20
信息查询
IPC分类:
