发明授权
- 专利标题: Negative-working radiation-sensitive resist composition
- 专利标题(中): 负性辐射敏感抗蚀剂组合物
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申请号: US52484申请日: 1993-04-23
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公开(公告)号: US5368783A公开(公告)日: 1994-11-29
- 发明人: Masakazu Kobayashi , Hatsuyuki Tanaka , Toshimasa Nakayama
- 申请人: Masakazu Kobayashi , Hatsuyuki Tanaka , Toshimasa Nakayama
- 申请人地址: JPX Kanagawa
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JPX Kanagawa
- 优先权: JPX4-137542 19920501
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/029 ; G03F7/038 ; H01L21/027 ; H01L21/30 ; G03C1/00 ; G03C5/00
摘要:
Disclosed is a novel negative-working radiation-sensitive resist composition useful in the photolithographic patterning works of resist layers on substrate surfaces in the manufacture of semiconductor devices and capable of giving a finely patterned resist layer with high resolution and having an excellently orthogonal cross sectional profile of the line-wise patterned resist layer with an outstandingly high sensitivity to various actinic rays. The composition comprises, as the essential ingredients, (a) an alkali-soluble resin such as a cresol novolac resin, (b) a specific alkoxymethylated amino resin, e.g., methoxymethylated melamine resin, and (c) a specific triazine compound in a limited weight proportion.
公开/授权文献
- USD377719S Multiple desk unit 公开/授权日:1997-02-04
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