发明授权
US5369486A Position detector for detecting the position of an object using a
diffraction grating positioned at an angle
失效
位置检测器,用于使用位于一定角度的衍射光栅来检测物体的位置
- 专利标题: Position detector for detecting the position of an object using a diffraction grating positioned at an angle
- 专利标题(中): 位置检测器,用于使用位于一定角度的衍射光栅来检测物体的位置
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申请号: US947383申请日: 1992-09-21
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公开(公告)号: US5369486A公开(公告)日: 1994-11-29
- 发明人: Takahiro Matsumoto , Noriyuki Nose , Minoru Yoshii , Kenji Saitoh , Masanobu Hasegawa , Koichi Sentoku
- 申请人: Takahiro Matsumoto , Noriyuki Nose , Minoru Yoshii , Kenji Saitoh , Masanobu Hasegawa , Koichi Sentoku
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX3-276953 19910927
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F9/00 ; H01L21/027 ; H01L21/30 ; G01B9/02
摘要:
A position detector includes a diffraction grating provided on the surface of an object, an illumination system for illuminating the diffraction grating, a detection system for detecting diffracted light diffracted from the diffraction grating, and a processing system for detecting positional information relating to the object. The illumination system emits a first pair of beams which are diffracted by the diffraction grating and interfere with each other, and emits a second pair of beams which are diffracted by the diffraction grating and also interfere with each other. The first pair of beams are incident upon the diffraction grating along a plane extending in a first direction in which the diffraction grating extends. The second pair of beams are incident upon the diffraction grating along a plane extending in a second direction in which the diffraction grating extends. The first and second directions are different from a grating line direction. The detection system detects the interfering light and generates first and second beat signals therefrom. The processing system detects positional information with respect to the first direction from the phase state of the first beat signal and with respect to the second direction from the phase state of the second beat signal.
公开/授权文献
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