发明授权
US5376601A Sintered product of aluminum nitride, a process for the preparation thereof, and a baking jig using the same 失效
氮化铝的烧结体,其制备方法和使用其的烘烤夹具

Sintered product of aluminum nitride, a process for the preparation
thereof, and a baking jig using the same
摘要:
A molded article is prepared from an AlN powder of a high purity without adding sintering assistant, baked in a nitrogen atmosphere without containing carbon, and is further heat-treated in a nitrogen atmosphere containing carbon in order to remove impurities in the sintered product. There is obtained a highly pure and dense sintered product which comprises mainly a phase of aluminum nitride, which has an average grain size of greater than 9 .mu.m, cationic metal impurities other aluminum, and Si, Fe and Ca in amounts smaller than predetermined values. The sintered product exhibits a very small creep rate when stress is applied thereto at high temperatures and is used as a material for high temperature uses such as a baking jig. Owing to its excellent anti-creeping property at high temperatures, tile product is suitably used as a structural material subject to stress at high temperatures for extended periods of time. When used as a baking jig, in particular, the sintered product does not adversely affect the molded articles and exhibits excellent durability.
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