An improved precision cleaning method includes introducing a solvent to a cleaning vessel, placing a workpiece in the cleaning vessel and contacting the workpiece with the solvent during a residence period. The cleaning vessel is then pressurized to a target pressure by adding carbon dioxide to the vessel, and additional carbon dioxide is pumped into the vessel while maintaining the target pressure to flush contents of the vessel. Cleaning may be enhanced by pressurizing to above the supercritical point of the carbon dioxide, and cleaning is further enhanced by application of sonic energy or mechanical agitation.