发明授权
- 专利标题： Controlled environment enclosure and mechanical interface
- 专利标题（中）： 受控环境机柜和机械接口
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申请号： US42917申请日： 1993-04-01
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公开(公告)号： US5378107A公开(公告)日： 1995-01-03
- 发明人: Oskar U. Vierny , Philip M. Salzman
- 申请人： Oskar U. Vierny , Philip M. Salzman
- 申请人地址： CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： CA Santa Clara
- 主分类号： B65G49/07
- IPC分类号： B65G49/07 ; H01L21/677 ; B65G49/00 ; B65G65/00
摘要：
Disclosed is a method for enabling the contents of a first chamber to be moved into a second chamber without exposing either chamber to elements making particulate-producing sliding contact. In one aspect of the invention, the method includes providing a carrier for a vertically spaced array of articles such as semiconductor wafers and having a clamping device for clampingly holding each of the articles; locating the carrier within the second chamber; opening the carrier by moving a first portion of the carrier upwardly from a second portion or,he carrier without producing sliding contact within the second chamber; and releasing the a clamping device without producing sliding contact within the second chamber, whereby the articles are accessible within the second chamber.
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