发明授权
US5383088A Storage capacitor with a conducting oxide electrode for metal-oxide
dielectrics
失效
具有用于金属氧化物电介质的导电氧化物电极的储存电容器
- 专利标题： Storage capacitor with a conducting oxide electrode for metal-oxide dielectrics
- 专利标题（中）： 具有用于金属氧化物电介质的导电氧化物电极的储存电容器
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申请号： US103620申请日： 1993-08-09
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公开(公告)号： US5383088A公开(公告)日： 1995-01-17
- 发明人: Jonathan D. Chapple-Sokol , Richard A. Conti , Jeffrey P. Gambino
- 申请人： Jonathan D. Chapple-Sokol , Richard A. Conti , Jeffrey P. Gambino
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： H01L27/04
- IPC分类号： H01L27/04 ; H01L21/02 ; H01L21/822 ; H01L21/8242 ; H01L27/10 ; H01L27/108 ; H01G1/01
摘要：
A capacitor having a high dielectric constant and method of making the same is disclosed. The capacitor comprises a bottom electrode comprising a conductive oxide deposited upon a substrate by chemical vapor deposition. A dielectric layer having a high dielectric constant is deposited upon the conductive oxide. Lastly, a counter electrode is formed upon the dielectric layer.
公开/授权文献
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