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US5384481A Antifuse circuit structure for use in a field programmable gate array and method of manufacture thereof 失效
用于现场可编程门阵列的防漏电路结构及其制造方法

Antifuse circuit structure for use in a field programmable gate array
and method of manufacture thereof
摘要:
An antifuse structure particularly suitable for field programmable gate arrays is presented. In most present day processes the antifuse structure is formed with a refractory metal layer, amorphous silicon layer and refractory metal layer sandwiched between two metal interconnection lines. Unprogrammed resistances of very high values, programmed resistances of very low values, short programming times and desirable programming voltages are among the advantages realized.
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