发明授权
- 专利标题: Absolute measuring apparatus using laser and scanning mirrors
- 专利标题(中): 使用激光和扫描镜的绝对测量装置
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申请号: US61555申请日: 1993-05-17
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公开(公告)号: US5388115A公开(公告)日: 1995-02-07
- 发明人: Hiroyuki Kawashima , Fumio Ohtomo , Susumu Saito , Isao Minegishi
- 申请人: Hiroyuki Kawashima , Fumio Ohtomo , Susumu Saito , Isao Minegishi
- 申请人地址: JPX
- 专利权人: Kabushiki Kaisha Topcon
- 当前专利权人: Kabushiki Kaisha Topcon
- 当前专利权人地址: JPX
- 优先权: JPX4-151136 19920520
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; H01S3/10 ; G01C3/00
摘要:
An absolute length measuring apparatus comprising light sources, a beam splitter, an object of measurement, a scanning mirror, a light receiver, sampling parts and a distance measuring part. The light sources emit alternately a plurality of coherent light beams having different wavelengths. The beam splitter splits the coherent light beam from the light sources into two optical paths. The object of measurement is located on one of the two optical paths stemming from the beam splitter. The scanning mirror is located on the other optical path stemming from the beam splitter and made movable in the direction of optical axis. The light receiver receives both the reflected light beam from the object of measurement and the reflected light beam from the scanning mirror through the beam splitter. The sampling parts generate sampling signals of various wavelengths by sampling the output of the light receiver every time the light sources emit a coherent light beam while scanned by the scanning mirror. The distance measuring part assumes a synthetic wavelength signal having a wavelength sufficiently greater than any individually generated wavelength based on the phase relations of the sampling signals, and measures the distance to the object of measurement in accordance with the synthetic wavelength signal.
公开/授权文献
- US5931197A Asymmetrical check valve 公开/授权日:1999-08-03
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