发明授权
- 专利标题: Method for producing a surface acoustic wave device
- 专利标题(中): 声表面波装置的制造方法
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申请号: US103729申请日: 1993-08-06
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公开(公告)号: US5390401A公开(公告)日: 1995-02-21
- 发明人: Shinichi Shikata , Hideaki Nakahata , Akihiro Hachigo , Naoji Fujimori
- 申请人: Shinichi Shikata , Hideaki Nakahata , Akihiro Hachigo , Naoji Fujimori
- 申请人地址: JPX Osaka
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX3-249747 19910927
- 主分类号: H03H9/145
- IPC分类号: H03H9/145 ; H03H3/08 ; H03H9/02 ; H03H9/05 ; H03H9/10 ; H03H9/25 ; H01L41/22
摘要:
A surface acoustic wave device is so manufactured that it's reliability is increased and so that it is surface-mountable with no requirement for packaging. The surface acoustic wave device (20) has a pair of opposite interdigital electrodes (2a, 2b) and a piezoelectric member (4) in close contact with the interdigital electrodes (2a, 2b). A portion located between the pair of interdigital electrodes (2a, 2b) propagates surface acoustic waves. This device (20) is characterized by an air bridge (13) covering the portion of the piezoelectric member (4) for propagating surface acoustic waves and the pair of interdigital electrodes (2a, 2b). The air bridge (13), may be provided with an insulating film (14) which is not in contact with the piezoelectric member (4).
公开/授权文献
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