发明授权
- 专利标题： Boron nitride vaporization vessel
- 专利标题（中）： 氮化硼蒸发容器
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申请号： US166470申请日： 1993-12-14
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公开(公告)号： US5395180A公开(公告)日： 1995-03-07
- 发明人: John T. Mariner
- 申请人： John T. Mariner
- 申请人地址： OH Lakewood
- 专利权人： Advanced Ceramics Corporation
- 当前专利权人： Advanced Ceramics Corporation
- 当前专利权人地址： OH Lakewood
- 主分类号： C23C14/24
- IPC分类号： C23C14/24 ; C23C14/26
摘要：
The vaporization vessel includes a body of substantially rectangular configuration having an upper relatively flat surface and a recessed cavity formed in the body with said cavity having a lateral cross sectional geometry which forms an included angle at the intersection with said substantially flat upper surface of greater than 120 degrees.