Invention Grant
US5407788A Photoresist stripping method 失效
光阻剥离法

  • Patent Title: Photoresist stripping method
  • Patent Title (中): 光阻剥离法
  • Application No.: US80865
    Application Date: 1993-06-24
  • Publication No.: US5407788A
    Publication Date: 1995-04-18
  • Inventor: Treliant Fang
  • Applicant: Treliant Fang
  • Applicant Address: NJ Murray Hill
  • Assignee: AT&T Corp.
  • Current Assignee: AT&T Corp.
  • Current Assignee Address: NJ Murray Hill
  • Main IPC: G03F7/42
  • IPC: G03F7/42 H01L21/027
Photoresist stripping method
Abstract:
The solubility of tetramethylammonium hydroxide pentahydrate in dimethyl sulfoxide is significantly increased by adding to the solution a quantity of dipropyleneglycol monomethylether. This permits up to twelve percent of the tetramethylammonium hydroxide pentahydrate to be dissolved in dimethyl sulfoxide, rather than the maximum of two percent that would otherwise be the case, which enhances the capacity of the solution to strip photoresist. Particularly, if the concentration of dipropyleneglycol monomethylether is in the range of ten to thirty percent, one can obtain both a high stripping rate and a much higher stripping capacity. For example, stripping capacity may be increased from one hundred forty substrates per gallon to six hundred substrates per gallon.
Public/Granted literature
Information query
Patent Agency Ranking
0/0