Invention Grant
- Patent Title: Generalized solids modeling for three-dimensional topography simulation
- Patent Title (中): 用于三维地形模拟的广义实体建模
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Application No.: US331159Application Date: 1994-10-28
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Publication No.: US5416729APublication Date: 1995-05-16
- Inventor: Francisco A. Leon , Donald L. Scharfetter , Gregory Anderson , Satoshi Tazawa , Akira Yoshii
- Applicant: Francisco A. Leon , Donald L. Scharfetter , Gregory Anderson , Satoshi Tazawa , Akira Yoshii
- Applicant Address: JPX Tokyo CA Santa Clara
- Assignee: Nippon Telegraph and Telephone Corporation,Intel Corporation
- Current Assignee: Nippon Telegraph and Telephone Corporation,Intel Corporation
- Current Assignee Address: JPX Tokyo CA Santa Clara
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G06T17/00 ; G06T17/40 ; G06F15/60 ; G06F15/20
Abstract:
A topography simulator using a "Generalized Solid Modeling (GSM) method" to simulate isotropic or anisotropic deposition and etch process steps on a workpiece. A solids modeling system that utilizes a boundary representation model for representing material object solids provides a basis for the topography simulator. A workpiece in the model is comprised of a collection of material solids. The present invention provides for accurately representing the interfaces of different material solids. The airspace above the top surface material is defined as an air solid. Boolean set operations between the various material solids and the air solid are performed to deform the wafer topography. The present invention further provides means for simulating an etch process step at the interface of materials with different etch rates.
Public/Granted literature
- US4422365A Drive control system for display devices Public/Granted day:1983-12-27
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