发明授权
US5418378A Ion implant device with modulated scan output 失效
具有调制扫描输出的离子注入装置

Ion implant device with modulated scan output
摘要:
An ion implanter is provided having a modulator which provides a variable frequency modulated scan signal. The modulator ensures that the scan signal will not retrace substantially upon itself during a scan cycle, and during subsequent scan cycles. Minimization of retrace allows for a more uniform dopant placed across the upper surface of the wafer and thereby eliminates or minimizes underdoping areas often arising between retraced beam widths when heavy atomic species are implanted.
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