发明授权
- 专利标题: Ion implant device with modulated scan output
- 专利标题(中): 具有调制扫描输出的离子注入装置
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申请号: US212247申请日: 1994-03-14
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公开(公告)号: US5418378A公开(公告)日: 1995-05-23
- 发明人: Donald L. Friede , Van Le , Denver L. Dolman
- 申请人: Donald L. Friede , Van Le , Denver L. Dolman
- 申请人地址: CA Sunnyvale
- 专利权人: Advanced Micro Devices
- 当前专利权人: Advanced Micro Devices
- 当前专利权人地址: CA Sunnyvale
- 主分类号: G21K5/04
- IPC分类号: G21K5/04 ; C23C14/48 ; H01J37/147 ; H01J37/317 ; H01L21/265 ; H01J37/302
摘要:
An ion implanter is provided having a modulator which provides a variable frequency modulated scan signal. The modulator ensures that the scan signal will not retrace substantially upon itself during a scan cycle, and during subsequent scan cycles. Minimization of retrace allows for a more uniform dopant placed across the upper surface of the wafer and thereby eliminates or minimizes underdoping areas often arising between retraced beam widths when heavy atomic species are implanted.
公开/授权文献
- US4947210A Multi-color copying machine 公开/授权日:1990-08-07
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