发明授权
- 专利标题: Relative position change amount detecting apparatus having bi-directional probe with compensated movement
- 专利标题(中): 具有补偿运动的双向探针的相对位置变化量检测装置
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申请号: US996889申请日: 1992-12-24
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公开(公告)号: US5432346A公开(公告)日: 1995-07-11
- 发明人: Hiroyasu Nose , Toshimitsu Kawase , Toshihiko Miyazaki , Takahiro Oguchi , Akihiko Yamano
- 申请人: Hiroyasu Nose , Toshimitsu Kawase , Toshihiko Miyazaki , Takahiro Oguchi , Akihiko Yamano
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX1-113691 19890508
- 主分类号: G01B7/00
- IPC分类号: G01B7/00 ; G01B7/28 ; G01D5/14 ; G01D5/243 ; G01D5/245 ; G01N37/00 ; G01Q10/04 ; G01Q60/10 ; G01Q90/00 ; G11B9/00 ; H02N2/00
摘要:
Information detecting apparatus comprises a probe arranged to face an information medium so as to relatively move to the information medium with thereby detect information thereon, a first vibrating device for vibrating the probe relative to the information medium in a first direction parallel with the information medium, and a first movement detecting device for detecting a state of relative displacement of the probe for the information medium in the first direction on the basis of information obtained by the probe which is caused to vibrate by the first vibrating device. A second vibrating device vibrates the probe relative to the information medium in a second direction which is parallel with the surface of the information medium and crosses the first direction, and a second movement detecting device detects a state of relative displacement of the probe with the information medium in the second direction on the basis of information obtain by the probe which is caused to vibrate by the second vibrating device.
公开/授权文献
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