发明授权
- 专利标题： Spacers used to form isolation trenches with improved corners
- 专利标题（中）： 隔板用于形成具有改进拐角的隔离沟槽
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申请号： US988613申请日： 1992-12-10
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公开(公告)号： US5433794A公开(公告)日： 1995-07-18
- 发明人: Pierre C. Fazan , Martin C. Roberts , Gurtej S. Sandhu
- 申请人： Pierre C. Fazan , Martin C. Roberts , Gurtej S. Sandhu
- 申请人地址： ID Boise
- 专利权人： Micron Technology, Inc.
- 当前专利权人： Micron Technology, Inc.
- 当前专利权人地址： ID Boise
- 主分类号： H01L21/762
- IPC分类号： H01L21/762 ; H01L49/00
摘要：
A trench for isolating active devices on a semiconductor substrate, formed by creating a trench which has a peripheral edge, and disposing an isolating material in the trench. The isolating material extends over the peripheral edge of the trench, thereby covering at least a portion of the substrate surrounding the trench, and substantially limiting leakage of the active devices disposed on the substrate.
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