发明授权
- 专利标题: Particle detection system with reflective line-to-spot collector
- 专利标题(中): 具有反射线对点收集器的粒子检测系统
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申请号: US34081申请日: 1993-03-22
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公开(公告)号: US5448364A公开(公告)日: 1995-09-05
- 发明人: Kevin E. Moran
- 申请人: Kevin E. Moran
- 申请人地址: NC Charlotte
- 专利权人: Estek Corporation
- 当前专利权人: Estek Corporation
- 当前专利权人地址: NC Charlotte
- 主分类号: G01N21/88
- IPC分类号: G01N21/88 ; G01B11/30 ; G01N21/94 ; G01N21/956 ; H01L21/66 ; G01B9/02 ; G01B11/24
摘要:
The surface inspection system has a scanning head for scanning the laser beam along a predetermined scan line across the surface of an article. A collector receives the light reflected from the article surface along the scan line. The collector has a first mirror position for receiving light reflected from the article surface, a second mirror oriented with respect to the first mirror to receive light reflected from the first mirror, and the first and second mirrors being configured and oriented so as to concentrate the reflected light from a line into a spot. A photodetector is positioned for receiving the thus formed spot of light. The method of inspecting the surface of an article includes the steps of scanning a laser beam along a predetermined scan line across the surface of the article, collectively receiving the light reflected from the article surface along the scan line with a plurality of mirrors so as to concentrate the reflected light from a line into a spot.
公开/授权文献
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