发明授权
US5459394A Electro-optic measurement device for the measurement of an electric signal in an electronic component 失效
用于测量电子部件中的电信号的电光测量装置

Electro-optic measurement device for the measurement of an electric
signal in an electronic component
摘要:
An electro-optical measurement device for the sampling of an electric signal (SI) in an electronic component by means of a radiation beam. Special embodiments of the electro-optic measurement device are described. An electro-optic sensor element is provided with an electrically conductive tip at one side and with an electrode at the other side, so that an absolute and calibrated measurement is possible. The measurement beam can be high-frequency pulsed with a pulse (Lp) per period of the test signal (SI). The pulse series is low-frequency modulated and the pulses exhibit, relative to the test signal, a constant phase relationship during the first half periods of the modulation signal and a varying phase relationship during the second half periods so that accurate and reliable measurement is possible.
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