发明授权
- 专利标题： Stacked piezoelectric surface acoustic wave device with a boron nitride layer in the stack
- 专利标题（中）： 堆叠中的叠氮化硼层叠压电声表面波器件
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申请号： US283251申请日： 1994-07-29
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公开(公告)号： US5463901A公开(公告)日： 1995-11-07
- 发明人: Akihiro Hachigo , Hideaki Nakahata , Shinichi Shikata , Naoji Fujimori
- 申请人： Akihiro Hachigo , Hideaki Nakahata , Shinichi Shikata , Naoji Fujimori
- 申请人地址： JPX Osaka
- 专利权人： Sumitomo Electric Industries, Ltd.
- 当前专利权人： Sumitomo Electric Industries, Ltd.
- 当前专利权人地址： JPX Osaka
- 优先权： JPX3-249744 19910927
- 主分类号： H03H9/145
- IPC分类号： H03H9/145 ; H03H9/02 ; H03H9/25 ; G01L9/00 ; H04R31/00
摘要：
A layer of boron nitride which is relatively easily workable is positioned in a stacked structure in close contact with a piezoelectric member, to provide a surface acoustic wave device which can be driven in a higher frequency range. Such a surface acoustic device (10) has a substrate (1), a boron nitride film (2) formed on the substrate (1), and a pair of interdigital electrodes (3a, 3b) formed on the boron nitride film (2). The interdigital electrodes (3a, 3b) are covered with a piezoelectric film (4), which is in close contact with the boron nitride film (2).
公开/授权文献
- US4439334A Enhanced oil recovery methods and systems 公开/授权日：1984-03-27
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