Invention Grant
- Patent Title: Method of manufacturing a thin-film magnetic head
- Patent Title (中): 制造薄膜磁头的方法
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Application No.: US216573Application Date: 1994-03-22
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Publication No.: US5483735APublication Date: 1996-01-16
- Inventor: Lambertus Postma , Jan Haisma , Jacobus J. M. Ruigrok , Gerardus H. J. Somers
- Applicant: Lambertus Postma , Jan Haisma , Jacobus J. M. Ruigrok , Gerardus H. J. Somers
- Applicant Address: NY New York
- Assignee: U.S. Philips Corporation
- Current Assignee: U.S. Philips Corporation
- Current Assignee Address: NY New York
- Priority: BEX09300274 19930322; EPX93200993 19930406
- Main IPC: G11B5/31
- IPC: G11B5/31 ; G11B5/39 ; G11B5/127
Abstract:
Method of manufacturing a magnetoresistive magnetic head in which a first insulation layer (5) of a non-magnetic material is formed on a support face (3a), on which insulation layer a soft-magnetic layer having an upper face remote from the first insulation layer is formed by deposition of a soft-magnetic material. Subsequently a layer portion is removed for forming the flux-guiding elements (17a, 17b) and an aperture extending between said elements, and non-magnetic material for forming a second insulation layer (18) having an upper face remote from the soft-magnetic layer is deposited on the soft-magnetic layer and in the aperture formed therein, which second insulation layer has such a thickness that, viewed in a direction transverse to the support face, the smallest distance between the support face and the upper face of the second insulation layer is larger than the largest distance between the support face and the upper face of the soft-magnetic layer. Subsequently, a mechanochemical polishing treatment is performed as from the upper face of the second insulation layer for forming a main surface (19) at which magnetoresistive material is subsequently deposited for forming a magnetoresistive element (23).
Public/Granted literature
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