发明授权
- 专利标题: Method for fabricating high density ultrasound array
- 专利标题(中): 高密度超声阵列制造方法
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申请号: US362338申请日: 1994-12-22
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公开(公告)号: US5497540A公开(公告)日: 1996-03-12
- 发明人: Subramaniam Venkataramani , Robert F. Kwasnick , Peter W. Lorraine
- 申请人: Subramaniam Venkataramani , Robert F. Kwasnick , Peter W. Lorraine
- 申请人地址: NY Schenectady
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 当前专利权人地址: NY Schenectady
- 主分类号: B06B1/06
- IPC分类号: B06B1/06 ; H01L41/22
摘要:
A high yield method of fabricating an ultrasound array having densely packed ultrasound elements with smooth surface finishes includes the steps of: 1) applying an acoustic matching material to opposites faces (or surfaces) of a piezo electric material ceramic block; 2) cutting the block in a plane perpendicular to the two faces of the block so as to form a plurality of wafers having the acoustic matching material disposed on opposite ends; 3) assembling the wafers to form a laminated body having respective portions of the matching layer on opposite surfaces and with the wafers each being separated from an adjacent wafer by a selected gap distance and bonded together by a polymeric adhesive material; 4) cutting the laminated body along a longitudinal axis so as to form a first laminate body subassembly and a second laminate body subassembly, each of the subassemblies having a front surface having the acoustic matching material disposed thereon and a back surface where the laminate body was cut; 5) applying a backing layer to each laminate body subassembly; and 6) removing the polymeric adhesive material disposed between the wafers, whereby each subassembly comprises an ultrasound array having transducer elements separated by the selected array gap distance.
公开/授权文献
- US4980497A Monomer of carbonate ester having isopropenylphenyl group 公开/授权日:1990-12-25
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