发明授权
US5503677A Process and device for coating the inner surface of greatly arched,
essentially dome-shaped substrates by CVD
失效
用于通过CVD涂覆大拱形的,基本上圆顶形的衬底的内表面的工艺和装置
- 专利标题: Process and device for coating the inner surface of greatly arched, essentially dome-shaped substrates by CVD
- 专利标题(中): 用于通过CVD涂覆大拱形的,基本上圆顶形的衬底的内表面的工艺和装置
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申请号: US340910申请日: 1994-11-15
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公开(公告)号: US5503677A公开(公告)日: 1996-04-02
- 发明人: Ewald Morsen , Helge Vogt , Johannes Segner
- 申请人: Ewald Morsen , Helge Vogt , Johannes Segner
- 申请人地址: DEX Mainz
- 专利权人: Schott Glaswerke
- 当前专利权人: Schott Glaswerke
- 当前专利权人地址: DEX Mainz
- 优先权: DEX4236056.0 19921026; DEX4334572.7 19931011
- 主分类号: C23C16/44
- IPC分类号: C23C16/44 ; C03C17/00 ; C23C16/04 ; C23C16/455 ; C23C16/50 ; C23C16/511 ; C23C16/515 ; C23C16/00
摘要:
A process and a device for coating the inner surface of a greatly arched, essentially dome-shaped substrate by CVD are described. In the process, the reaction gases, which contain the layer-former molecules, are conveyed into the reaction chamber containing the substrate(s) to be coated, through at least one gas inlet, placed facing the vertex of the dome at a distance from the surface to be coated. Deposition of the layer material on the substrate is brought about in a way known in the art by producing a reaction zone on the inner surface of the substrate to be coated. According to the invention, the reaction gases do not, as is usual for known processes, flow slowly into the reaction chamber. Instead, for production of a uniform coating, the reaction gases are introduced into the reaction chamber at a high speed such that the product of Reynolds number, R, of the gas jet in or in the immediate vicinity of the gas inlet and the distance, h, between the gas inlet and the dome vertex is:400